Zhang et al., 2019 - Google Patents
Hierarchical microstructures with high spatial frequency laser induced periodic surface structures possessing different orientations created by femtosecond laser …Zhang et al., 2019
View HTML- Document ID
- 12647476199382406233
- Author
- Zhang D
- Sugioka K
- Publication year
- Publication venue
- Opto-Electronic Advances
External Links
Snippet
High spatial frequency laser induced periodic surface structures (HSFLs) on silicon substrates are often developed on flat surfaces at low fluences near ablation threshold of 0.1 J/cm2, seldom on microstructures or microgrooves at relatively higher fluences above 1 …
- 238000000608 laser ablation 0 title abstract description 45
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0626—Energy control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Zhang et al. | Hierarchical microstructures with high spatial frequency laser induced periodic surface structures possessing different orientations created by femtosecond laser ablation of silicon in liquids | |
Lei et al. | Ultrafast laser applications in manufacturing processes: A state-of-the-art review | |
Zhou et al. | Enhancement of laser ablation via interacting spatial double-pulse effect | |
US8143686B2 (en) | Laser-induced structuring of substrate surfaces | |
Liu et al. | Porous microstructures induced by picosecond laser scanning irradiation on stainless steel surface | |
US20140273535A1 (en) | Systems and Methods of Laser Texturing and Crystallization of Material Surfaces | |
Chen et al. | Large-area straight, regular periodic surface structures produced on fused silica by the interference of two femtosecond laser beams through cylindrical lens | |
Anoop et al. | Direct femtosecond laser ablation of copper with an optical vortex beam | |
RU2544892C1 (en) | Method of producing micro- and nanostructures of surface of materials | |
Li et al. | Nanosecond pulsed laser cleaning of titanium alloy oxide films: Modeling and experiments | |
Meng et al. | Dual-scale nanoripple/nanoparticle-covered microspikes on silicon by femtosecond double pulse train irradiation in water | |
Li et al. | High period frequency LIPSS emerging on 304 stainless steel under the irradiation of femtosecond laser double-pulse trains | |
Chen et al. | Nanosecond laser-induced controllable periodical surface structures on silicon | |
Zhang et al. | Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation | |
Zhu et al. | Fabrication of oxide-free dimple structure on germanium via electrochemical jet machining enhanced by opposing laser irradiation | |
Zuhlke | Control and understanding of the formation of micro/nanostructured metal surfaces using femtosecond laser pulses | |
Kumthekar et al. | Effects of machining parameters on Ni-Mn-Ga-based alloys for fabrication of multifunctional micro devices using femtosecond pulse width laser | |
Butkus et al. | Micromachining of transparent, semiconducting and metallic substrates using femtosecond laser beams | |
Liao et al. | Experimental study on fabricating micro-hole arrays on CVD diamond film using a nanosecond pulsed laser | |
Liu et al. | Evolution and mechanism of the periodical structures formed on Ti plate under femtosecond laser irradiation | |
Bartnik et al. | Combined effect of EUV irradiation and acetone treatment on PET surface | |
Gadag | Studying the mechanism of micromachining by short pulsed laser | |
Wang et al. | Study of femtosecond laser ablation effect on micro-processing for 4H-SiC substrate | |
Swamulu et al. | Non-spherical aluminum nanoparticles fabricated using picosecond laser ablation | |
Salazar et al. | Nanostructuring of material surfaces by laser ablation |