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Hara et al., 2017 - Google Patents

Hydrogenation of Polycrystalline Silicon Thin‐Film Transistors

Hara et al., 2017

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Document ID
8072040336810049800
Author
Hara A
Kitahara K
Publication year
Publication venue
New Advances in Hydrogenation Processes-Fundamentals and Applications

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In this chapter, the behavior of hydrogen (H) atoms in polycrystalline silicon (poly‐Si) thin film is investigated in detail in order to evaluate and improve the quality of hydrogenated poly‐Si thin films. Hydrogenation drastically improves the Hall effect mobility, whereas …
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