Abstract

The efficient transmission of high-power excimer laser radiation through fused silica optical fibers would greatly benefit several applications in medicine and materials processing. A study was, therefore, undertaken^1,2 to better understand the fundamental limitations in fiber-optic transmission of excimer laser radiation. We have found that surface damage is the limiting factor at 308-nm (XeCI) and 351-nm (XeF). We show that nonlinear absorption and optically induced bulk attenuation limit the use of these fibers at 193-nm (ArF) and 248-nm (KrF).

© 1988 Optical Society of America