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Optica Publishing Group
Conferences > CLEO > 1988 > WD > WD3
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1988),
  • paper WD3

Spectroellipsometry of thin films

K. VEDAM and S. Y. KIM

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Abstract

The internal physical structure of vacuum de-posited thin films is invariably inhomogeneous, and this has been the major drawback in the effective utilization of thin films in a variety of optical devices. Even the basic data on the true refractive-index absorption coefficient and its dispersion of many materials are not available in the literature, since they are not available in bulk form, and in thin-film form they are inhomogeneous with consequent irreproducible results.

© 1988 Optical Society of America

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