Abstract
Shape and surface topography evaluation from measured orthogonal slope/gradient data is of considerable engineering significance as many full-field optical sensors and interferometers readily output such a data accurately. This has applications ranging from metrology of optical and electronic elements, surface profile estimation, wave front and shape reconstruction, to name a few. In this context, a recently developed non-contact, full-field optical method called Digital Gradient Sensing (DGS) capable of measuring small angular deflections of light rays (~10−4 degree) is used to measure surface slopes of a silicon wafer subjected to mechanical deformations. A robust Higher-order Finite-difference-based Least-squares Integration (HFLI) scheme in the Southwell configuration is developed to reconstruct the surface topography. It involves solving a set of integration equations to compute the values of out-of-plane deflections based on least-squares approach.
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Acknowledgement
The authors acknowledge the support of this research through Department of Defense grants W31P4Q-14-C-0049 and W911NF-12-1-0317.
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Miao, C., Tippur, H.V. (2017). Measurement of Orthogonal Surface Gradients and Reconstruction of Surface Topography from Digital Gradient Sensing Method. In: Yoshida, S., Lamberti, L., Sciammarella, C. (eds) Advancement of Optical Methods in Experimental Mechanics, Volume 3. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, Cham. https://doi.org/10.1007/978-3-319-41600-7_26
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DOI: https://doi.org/10.1007/978-3-319-41600-7_26
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