A novel wafer-scale semi-automated dry transfer process for monolayer (1L) CVD WS 2 was developed utilizing the weakly coupled interface between semimetal (Bi) ...
Jul 21, 2022 · A novel wafer-scale semi-automated dry transfer process for monolayer (1L) CVD WS2 was developed utilizing the weakly coupled interface between ...
Aug 18, 2024 · Processes for the deposition of 2D materials using metalorganic chemical vapor deposition (MOCVD) have been developed on 300 mm wafers for MoS 2 ...
深入研究「Wafer-Scale Bi-Assisted Semi-Auto Dry Transfer and Fabrication of High-Performance Monolayer CVD WS2Transistor」主題。共同形成了獨特的指紋。
A novel wafer-scale semi-automated dry transfer process for monolayer (1L) CVD WS 2 was developed utilizing the weakly coupled interface between semimetal (Bi) ...
Media – 2022 IEEE Symposium on VLSI Technology & Circuits - Archive
archive.vlsisymposium.org › media
18: High resolution JPEG. Session T1-5: “Wafer-Scale Bi-Assisted Semi-Auto Dry Transfer and Fabrication of High-Performance Monolayer CVD WS2 Transistor” – TSMC.
Jul 10, 2024 · This study introduces an innovative approach to realize high-performance WS 2 MOSFETs by utilizing bilayer WS 2 (2L-WS 2 ) in the contact region grown through ...
(PDF) Monolayer transistors at wafer scales - ResearchGate
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Sep 7, 2024 · Monolayer transition metal dichalcogenide transistors can be fabricated on 300 mm wafers using an approach that is compatible with back-end-of- ...
Nov 2, 2024 · (8) Li, M.-Y. et al. Wafer-Scale Bi-Assisted Semi-Auto Dry Transfer and Fabrication of High-Performance Monolayer CVD WS2.
May 29, 2024 · Wafer-scale bi-assisted semi-auto dry transfer and fabrication of high-performance monolayer CVD WS2 transistor. In: Proceedings of IEEE ...