In this paper, we develop a system, called “3D Builder”, to enable the users to easily visualize the results of the simulation of the lithographic process and ...
Abstract. As semiconductor technology rapidly advances, lithography with high density and fine feature size has become the challenge for nanometer-scale.
In this paper, we develop a system, called “3D Builder”, to enable the users to easily visualize the results of the simulation of the lithographic process and ...
As semiconductor technology rapidly advances, lithography with high density and fine feature size has become the challenge for nanometer-scale integrated ...
In this paper we discuss the design, fabrication, and performance of multi-level grating array illuminators. A complete fabrication error analysis is carried ...
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Aug 20, 2024 · We propose a scalable “photolithography–transfer–plating” method to pattern stable and durable microstructures on 3D metallic surfaces.
A methodology of 3D photolithography through light field projections with a microlens array (MLA) is proposed and demonstrated.
Jul 25, 2023 · The present paper describes a vat-photopolymerization technique using a high-resolution liquid crystal display (LCD), as a dynamic mask-generator, to ...
Jun 6, 2019 · This article gives an overview of various photochemical reactions in polymers, photosensitive materials, and structuring techniques making use of light
Oct 30, 2024 · Lithography technology is a powerful tool for preparing complex microstructures through projecting patterns from static templates with ...