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It is found that the addition of surfactant agents in the etching solution improves etching morphology of Si, regardless of polarity of the surfactants.
It is found that the addition of surfactant agents in the etching solution improves etching morphology of Si, regardless of polarity of the surfactants.
The effects of different sintering addictives on the preparation of CaF2 transparent ceramics were studied. Transparent CaF2 ceramics were fabricated by vacuum ...
3 The etching behavior drastically changes depending on the treatment conditions, e.g., kind of metal catalysts, composition of etching solution, and doping ...
Microfabrication of X-ray Optics by Metal Assisted Chemical Etching
www.ncbi.nlm.nih.gov › PMC7344591
Jun 12, 2020 · This paper provides an extensive overview of the fundamentals and recent developments of MacEtch as well as addressing the research gaps in this ...
A method of metal-assisted chemical etching comprises forming an array of discrete metal features on a surface of a semiconductor structure, ...
“Experimental Study of Design Parameters in Periodic Silicon Micropillar Array Solar Cells Produced by Soft Lithography and Metal Assisted. Chemical Etching,” ...
Missing: Additives Preparation
Nov 21, 2013 · The reported method successfully fabricated vertical trenches on silicon with a width down to 2 μm and an aspect ratio of 16.
The review provides researchers and engineers with an extensive and updated understanding of the principles and applications of MacEtch as a new technology for ...
Additionally, we also showed additives of etching solution is also important to obtain well-defined vertical Si holes using MacEtch. Academic Significance and ...