The improved tangent space based distance metric is a more reliable and accurate metric for hotspot cluster analysis and classification. It is more suitable for ...
In this paper, we propose an Improved Tangent Space (ITS) based distance metric for hotspot classification and detection. Compared with the existing XOR ...
In this paper, we propose an improved tangent space (ITS)-based distance metric for hotspot cluster analysis and classification. The proposed distance metric is ...
In this paper, we propose an improved tangent space based distance metric for hotspot cluster analysis and classification. The proposed distance metric is an ...
In this paper, we propose an improved tangent space (ITS)-based distance metric for hotspot cluster analysis and classification. The proposed distance metric is ...
Zeng, “Improved tan- gent space based distance metric for accurate lithographic hotspot classification,” in DAC, 2012, pp. 1173–1178. [20] L. Liebmann, D ...
Improved Tangent Space Based Distance Metric for Lithographic Hotspot Classification ... based distance metric for hotspot cluster analysis and classification ...
title = {Improved Tangent Space Based Distance Metric for Lithographic Hotspot Classification},. author = {Yang, Fan and Sinha, Subarna and Chiang, Charles C ...
Improved tangent space based distance metric for accurate lithographic hotspot classification ... The improved tangent space based distance metric is a ...
The pattern matching-based detection method detects hotspots by evaluating the degree of similarity between the layout patterns and the registered hotspot ...
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