We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure is highly ...
The proposed fully decoupled silicon micromachined tri-axis linear vibratory gyroscope structure is highly symmetrical and can differentially detect three ...
The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes' angular ...
Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory ...
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The proposed gyroscope structure is highly symmetrical and can be limited to an area of about 8.5 mm × 8.5 mm. It can differentially detect three axes' angular ...
Jul 18, 2015 · We present in this paper a novel fully decoupled silicon micromachined tri-axis linear vibratory gyroscope. The proposed gyroscope structure ...
This novel gyroscope structure is designed be perfectly symmetrical with a relatively large size of about 9.8 mm × 9.8 mm.
In this study, the design of a tri-axis micromachined gyroscope is proposed and the vibration characteristic of the structure is analyzed.
Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes. Sensors 2015, 15, 16929-16955. https://doi.org ...
Design and Analysis of a Novel Fully Decoupled Tri-axis Linear Vibratory Gyroscope with Matched Modes ... This paper presents a tri-axis MEMS gyroscope design ...
This paper presents an innovative microgyroscope design. Solely by planar fabrication and wet etching, the proposed microgyroscope is capable to detect ...