In this approach, phase conflicts are corrected by introducing cuts in the shifters at points where two opposite-phase shifters meet. While this approach avoids ...

Oct 25, 2007 · The proposed approach for conflict detection shows significant improvements in the quality of results and runtime for real industrial circuits, ...

The proposed approach for conflict detection shows significant improvements in the quality of results and runtime for real industrial circuits, when compared to ...

The proposed approach for conflict detection shows significant improvements in the quality of results and runtime for real industrial circuits, when compared to ...

The phase conflict correction problem corrects a given set of phase conflicts by layout/mask modification with minimum increases in area or mask complexity. Our ...

A new approach to detect a minimal set of phase conflicts, which when corrected will produce a phase-assignable layout, and a novel layout modification ...

The proposed approach for conflict detection shows significant improvements in the quality of results and runtime for real industrial circuits, when compared to ...

Alternating-aperture phase shift masking (AAPSM), a form of strong resolution enhancement technology, will be used to image critical features on the ...

As feature sizes shrink, it will be necessary to use AAPSM (Alternating-Aperture Phase Shift Masking) to image critical features, especially on the ...

The proposed approach for conflict detection shows significant improvements in the quality of results and runtime for real industrial circuits, when compared to ...