Jan 24, 2012 · This paper addresses their real-time operational issues. To characterize their schedulability and achieve the minimum cycle time at their steady-state ...

This work proposes a two-level approach to the real-time operational problem for dual-arm cluster tools with residency time constraints and bounded activity ...

This model describes the robot activity sequence with robot waits included. Via this model, to operate a cluster tool is to determine robot wait times and a two ...

System and method for determining an optimized schedule of a production line · Petri net-based optimal one-wafer cyclic scheduling of treelike hybrid multi- ...

Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets. Wu, N. Q., Zhou ...

Modeling and Schedulability Analysis of Single-Arm Cluster Tools with Wafer Residency Time Constraints Using Petri Net · Computer Science, Engineering. 2008 IEEE ...

In this paper, a Petri net (PN) model is developed to describe their operations. Based on it, it is found that, if a swap strategy is applied, such tools are ...

Besides the well-known residency time constraints (RTCs), a dual-arm cluster tool also requires each robot arm to execute a specific set of tasks. We call such ...

They analyze the effect of activity time variation on the wafer sojourn time delay in a PM in a dual-arm cluster tool by a Petri net model in [Wu and Zhou, ...

This work develops a Petri net model that represents the tool behavior and develops a mixed integer programming (MIP) model to determine optimal sequences ...