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Study on different isolation technology on the performance of blue micro-LEDs array applications.

Author information

Affiliations

  • 1. Institute of Electrics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan, ROC.
      Authors
    • Lin SH 1
    • Horng RH 1
    (2 authors)
  • 2. Department of Photonis, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan, ROC.
      Authors
    • Lo YY 2
    • Hsu YH 2
    • Zan HW 2
    • Lin YH 2
    (4 authors)
  • 3. Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, 10617, Taiwan, ROC.
      Authors
    • Lin CC 3
    (1 author)
  • 4. Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Nantou, 54561, Taiwan, ROC.
      Authors
    • Wuu DS 4
    (1 author)
  • 5. Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, 581 83, Linköping, Sweden.
      Authors
    • Hsiao CL 5
    (1 author)

Discover Nano, 13 Jun 2024, 19(1):102
https://doi.org/10.1186/s11671-024-04047-z PMID: 38869646 

Abstract 

In this study, a 3 × 3 blue micro-LED array with a pixel size of 10 × 10 μm2 and a pitch of 15 μm was fabricated on an epilayer grown on a sapphire substrate using metalorganic chemical vapor deposition technology. The fabrication process involved photolithography, wet and dry etching, E-beam evaporation, and ion implantation technology. Arsenic multi-energy implantation was utilized to replace the mesa etching for electrical isolation, where the implantation depth increased with the average energy. Different ion depth profiles had varying effects on electrical properties, such as forward current and leakage currents, potentially causing damage to the n-GaN layer and increasing the series resistance of the LEDs. As the implantation depth increased, the light output power and peak external quantum efficiency of the LEDs also increased, improving from 5.33 to 9.82%. However, the efficiency droop also increased from 46.3 to 48.6%.

Full text links 

Read article at publisher's site: https://doi.org/10.1186/s11671-024-04047-z

Read article for free, from open access legal sources, via Unpaywall: https://link.springer.com/content/pdf/10.1186/s11671-024-04047-z.pdfUnpaywall

References 

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    Funding 

    Funders who supported this work.

    National Science and Technoloy Concil, Taiwan (1)