Microtechnology/Microelectromechanical Systems (MEMS)
Applications
editResonators
editStrain Gauges
editPressure Sensors
editAFM cantilevers
editAcceleration Detectors
editOptical Beam Control
editRF MEMS
editReliability design rules
editSandia has published a set of "reliability design rules" for MEMS devices intended to avoid failure modes experienced in early MEMS device tests. The most common failure mechanism was wear of the rubbing surfaces. [1]
References
editSee also notes on editing this book about how to add references Microtechnology/About#How to Contribute.
- ↑ Danelle M. Tanner et. al. "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes". Sandia. 2000.