article

Fine pattern fabrication on glass surface by imprint lithography

Authors:

K. Yao,

Y. TanakaAuthors Info & Claims

Microelectronic Engineering, Volume 67-68, Issue 1

Pages 237 - 244

https://doi.org/10.1016/S0167-9317(03)00077-7

Published: 01 June 2003 Publication History

Abstract

Fabrication of fine grating on a glass surface is achieved by imprint lithography using a Si₃N₄/SiO₂/Si mold and a low T_g glass. A fine Si based mold is fabricated by a conventional VLSI process and the mold is directly pressed to a thin glass plate using a hot-press machine. The imprint conditions are designed based on the measured visco-elastic properties of the glass. Sub-micron patterns down to 250 nm in line width are successfully fabricated on the glass surface at low temperature without fatal errors. As the line width becomes smaller, higher pressures are required to achieve full compression. The surface of the imprinted glass is very flat.

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Cited By

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Ikeda HKasa HNishii J(2016)Effect of mold stiffness on surface flatness of mold-pressed glassMicrosystem Technologies10.1007/s00542-015-2521-822:8(2087-2091)Online publication date: 1-Aug-2016
https://dl.acm.org/doi/10.1007/s00542-015-2521-8
Chen QChen QMilanese DFerraris M(2009)Micro-structures fabrication on glasses for micro-fluidics by imprinting techniqueMicrosystem Technologies10.5555/3111527.311184815:7(1067-1071)Online publication date: 1-Jul-2009
https://dl.acm.org/doi/10.5555/3111527.3111848
Hung YLu YSung C(2009)Microstructure patterning on glass substrate by imprinting processMicroelectronic Engineering10.1016/j.mee.2009.02.01586:4-6(577-582)Online publication date: 1-Apr-2009
https://dl.acm.org/doi/10.1016/j.mee.2009.02.015
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Index Terms

Fine pattern fabrication on glass surface by imprint lithography
1. Applied computing
  1. Physical sciences and engineering
2. Hardware
  1. Emerging technologies

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Published In

Microelectronic Engineering Volume 67-68, Issue 1

June 2003

969 pages

ISSN:0167-9317

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Elsevier Science Ltd.

United Kingdom

Publication History

Published: 01 June 2003

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Ikeda HKasa HNishii J(2016)Effect of mold stiffness on surface flatness of mold-pressed glassMicrosystem Technologies10.1007/s00542-015-2521-822:8(2087-2091)Online publication date: 1-Aug-2016
https://dl.acm.org/doi/10.1007/s00542-015-2521-8
Chen QChen QMilanese DFerraris M(2009)Micro-structures fabrication on glasses for micro-fluidics by imprinting techniqueMicrosystem Technologies10.5555/3111527.311184815:7(1067-1071)Online publication date: 1-Jul-2009
https://dl.acm.org/doi/10.5555/3111527.3111848
Hung YLu YSung C(2009)Microstructure patterning on glass substrate by imprinting processMicroelectronic Engineering10.1016/j.mee.2009.02.01586:4-6(577-582)Online publication date: 1-Apr-2009
https://dl.acm.org/doi/10.1016/j.mee.2009.02.015
Youn STakahashi MGoto HMaeda R(2006)Microstructuring of glassy carbon mold for glass embossing - Comparison of focused ion beam, nano/femtosecond-pulsed laser and mechanical machiningMicroelectronic Engineering10.1016/j.mee.2006.05.00783:11-12(2482-2492)Online publication date: 1-Nov-2006
https://dl.acm.org/doi/10.1016/j.mee.2006.05.007

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Abstract

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Recommendations

Template replication for full wafer imprint lithography

Full wafer microlens replication by UV imprint lithography

Investigation on LIGA-like process based on multilevel imprint lithography

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