research-article

A mathematical model for estimating defect inspection capacity with a dynamic control strategy

Authors:

Gloria Luz Rodriguez-Verjan,

Stéphane Dauzère-Pérès,

Jacques PinatonAuthors Info & Claims

WSC '12: Proceedings of the Winter Simulation Conference

Article No.: 186, Pages 1 - 9

Published: 09 December 2012 Publication History

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Abstract

In this paper, we introduce a mathematical model for estimating the use of defect inspection capacity. Until recently, the selection of lots to be inspected was only done at the beginning of the manufacturing process. With the introduction of dynamic controls on production tools, the selection of lots to be inspected is done according to the production state. Our problem focuses on the Wafer at Risk (W@R) on process tools. The W@R is the number of processed wafers between two control operations. The W@R depends on several factors such as the availability of measurable products, control limits, defect inspection capacity and defect inspection control plans of products. Our model aims at calculating the defect inspection capacity required for given values of the listed factors. Experimental results on actual factory data are presented and discussed.

References

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Cited By

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Rodriguez-Verjan GDauzère-Pérès SPinaton J(2015)Optimized allocation of defect inspection capacity with a dynamic sampling strategyComputers and Operations Research10.1016/j.cor.2014.06.02453:C(319-327)Online publication date: 1-Jan-2015
https://dl.acm.org/doi/10.1016/j.cor.2014.06.024
Rotondo AGeraghty JYoung PHill RKuhl M(2013)Quality risk analysis at sampling stations crossed by one monitored product and an unmonitored flowProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675854(3672-3683)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675854

Index Terms

A mathematical model for estimating defect inspection capacity with a dynamic control strategy
1. Applied computing
  1. Computers in other domains
  2. Operations research
    1. Industry and manufacturing
      1. Command and control
2. Computing methodologies
  1. Modeling and simulation
    1. Model development and analysis
      1. Model verification and validation

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Published In

WSC '12: Proceedings of the Winter Simulation Conference

December 2012

4271 pages

General Chair:
Oliver Rose
Universität der Bundeswehr München, Germany
,
Program Chair:
Adelinde M. Uhrmacher
University of Rostock, Germany

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Winter Simulation Conference

Publication History

Published: 09 December 2012

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WSC '12

Sponsor:

IIE
INFORMS-SIM
SCS
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WSC '12: Winter Simulation Conference

December 9 - 12, 2012

Berlin, Germany

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WSC '12 Paper Acceptance Rate 189 of 384 submissions, 49%;

Overall Acceptance Rate 3,413 of 5,075 submissions, 67%

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Cited By

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Rodriguez-Verjan GDauzère-Pérès SPinaton J(2015)Optimized allocation of defect inspection capacity with a dynamic sampling strategyComputers and Operations Research10.1016/j.cor.2014.06.02453:C(319-327)Online publication date: 1-Jan-2015
https://dl.acm.org/doi/10.1016/j.cor.2014.06.024
Rotondo AGeraghty JYoung PHill RKuhl M(2013)Quality risk analysis at sampling stations crossed by one monitored product and an unmonitored flowProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675854(3672-3683)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675854

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Optimized allocation of defect inspection capacity with a dynamic sampling strategy

Improving defect detection ability with adaptive software inspection checklists

Skipping algorithms for defect inspection using a dynamic control strategy in semiconductor manufacturing