Cited By
View all- Aluru NWhite JYoffa EDe Micheli GRabaey J(1997)Algorithms for coupled domain MEMS simulationProceedings of the 34th annual Design Automation Conference10.1145/266021.266321(686-690)Online publication date: 13-Jun-1997
A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures
Authors: 
X. Cai, H. Yie, P. Osterberg, J. Gilbert, S. Senturia, J. WhiteAuthors Info & Claims
Pages 283 - 286
References
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M.A. Huff and M. A. Schmidt, "Fabrication, Packaging, and Testing of a Wafer-Bonded Microvalve," Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton-Head Island, SC, June 1992, pp. 195-197.
[2]
W. C. Tang, M. G. Lira, and R. T. Howe, "Electrostatic comb drive levitation and control method," Journal of Microelectromechanical Systems, vol. 1, Number 4, Dec. 1992, pp. 170-178.
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K. J. Bathe, Finite Element Procedures in Engineering Analysis. Englewood Cliffs, NJ: Prentice- Hall, 1982.
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C. A. Brebbia and J. Dominguez, Boundary Elements: An Introductory Course. Southampton: Computational Mechanics Publications, 1989. Copublished with McGraw-Hill, New York.
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Hibbit, Karlsson, and Sorensen, inc., Providence, R.I.
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K. Nabors and J. White, "FastCap: A multipoleaccelerated 3-D capacitance extraction program." IEEE Transactions on Computer-Aided Design, vol. 10 no. 10, November 1991, p1447-1459.
- A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures
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- SIGDA: ACM Special Interest Group on Design Automation
- IEEE-CS: Computer Society
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IEEE Computer Society Press
Washington, DC, United States
Publication History
Published: 07 November 1993
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ICCAD '93
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- SIGDA
- IEEE-CS
ICCAD '93: International Conference on Computer Aided Design
November 7 - 11, 1993
California, Santa Clara, USA
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Overall Acceptance Rate 457 of 1,762 submissions, 26%
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Cited By
View all- Aluru NWhite JYoffa EDe Micheli GRabaey J(1997)Algorithms for coupled domain MEMS simulationProceedings of the 34th annual Design Automation Conference10.1145/266021.266321(686-690)Online publication date: 13-Jun-1997
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