Nothing Special   »   [go: up one dir, main page]
Top > IJAT > Magnetic Levitation Technology for Precision Motion Systems: A ...

single-au.php

IJAT Vol.16 No.4 pp. 386-402
doi: 10.20965/ijat.2022.p0386
(2022)

Review:

Views over last 60 days: 1,766

Magnetic Levitation Technology for Precision Motion Systems: A Review and Future Perspectives

Lei Zhou† and Jingjie Wu

Department of Mechanical Engineering, The University of Texas at Austin
204 E Dean Keeton Street, Austin, Texas 78712, USA

†Corresponding author

Received:
February 7, 2022
Accepted:
February 28, 2022
Published:
July 5, 2022
Creative Commons License
Keywords:
magnetic levitation, mechatronics, actuators, precision motion systems, precision positioning
Abstract

Precision motion systems are the core of a wide range of manufacturing equipment and scientific instruments, and their motion performance directly determines the quality and speed of the associated manufacturing or metrology processes. Magnetically levitated precision motion systems, where the moving target is supported by magnetic forces and without any mechanical contact, provide advantages of frictionless motion, vacuum compatibility, and contamination-free operation. These features endow the magnetic levitation technology with the capability to deliver excellent overall performance for precision positioning systems. Through decades of research and engineering efforts, significant advances have been made in the actuation, sensing, design, and control of magnetically levitated precision motion systems. This paper provides an introduction to the fundamentals of the feedback control, actuation, and sensing for the magnetic levitation technology, and provides a comprehensive literature review of various magnetically levitated precision positioning systems developed over the past three decades. The final part of this paper identifies several challenges in the design and control of today’s precision motion systems using magnetic levitation and provides an outlook on the possible directions for future research and development.

Cite this article as:
L. Zhou and J. Wu, “Magnetic Levitation Technology for Precision Motion Systems: A Review and Future Perspectives,” Int. J. Automation Technol., Vol.16 No.4, pp. 386-402, 2022.
Data files:
References
  1. [1] “ASML TWINSCAN NXE:3400C.” https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe3400c [Accessed December 1, 2021]
  2. [2] “KLA Defect Inspection and Review.” https://www.kla.com/products/chip-manufacturing/defect-inspection-review [Accessed January 1, 2022]
  3. [3] “Laser Scan Heads: Position your laser spot with unprecedented speed, precision and stability.” https://www.aerotech.com/motion-and-positioning/laser-scan-heads/ [Accessed January 1, 2022]
  4. [4] “Kulicke & Soffa.” https://www.kns.com/ [Accessed January 1, 2022]
  5. [5] “Atomic Force Microscopes.” https://www.afmworkshop.com/ [Accessed January 1, 2022]
  6. [6] J. Deng, C. Preissner, J. A. Klug, S. Mashrafi, C. Roehrig, Y. Jiang, Y. Yao, M. Wojcik, M. D. Wyman, D. Vine et al., “The velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging,” Review of Scientific Instruments, Vol.90, No.8, 083701, 2019.
  7. [7] “Wafer Handling Robot, Precision Motion Control Solutions.” https://www.kensingtonlabs.com/company-history/ [Accessed January 1, 2022]
  8. [8] Y. Altintas, A. Verl, C. Brecher, L. Uriarte, and G. Pritschow, “Machine tool feed drives,” CIRP Annals, Vol.60, No.2, pp. 779-796, 2011.
  9. [9] X. Dong, D. Yoon, and C. E. Okwudire, “A novel approach for mitigating the effects of pre-rolling/pre-sliding friction on the settling time of rolling bearing nanopositioning stages using high frequency vibration,” Precision Engineering, Vol.47, pp. 375-388, 2017.
  10. [10] F. Matsumura, Y. Okada, M. Fujita, and T. Namerikawa, “State of the Art of Magnetic Bearings: Overview of Magnetic Bearing Research and Applications,” JSME Int. J. Series C Mechanical Systems, Machine Elements and Manufacturing, Vol.40, No.4, pp. 553-560, 1997.
  11. [11] G. Schweitzer, “Safety and reliability aspects for active magnetic bearing applications – A survey,” Proc. of the Institution of Mechanical Engineers, Part I: J. of Systems and Control Engineering, Vol.219, No.6, pp. 383-392, 2005.
  12. [12] D. Eaton, J. Rama, and S. Singhal, “Magnetic bearing applications & economics,” 2010 Record of Conf. Papers, Industry Applications Society 57th Annual Petroleum and Chemical Industry Conf. (PCIC), pp. 1-9, 2010.
  13. [13] L. Zhou, M. I. Nejad, and D. L. Trumper, “One-axis hysteresis motor driven magnetically suspended reaction sphere,” Mechatronics, Vol.42, pp. 69-80, 2017.
  14. [14] N. R. Hemenway, H. Gjemdal, and E. L. Severson, “Magnetic bearing technology for industrial bearingless motor systems,” Proc. of the 2019 IEEE Workshop on Electrical Machines Design, Control and Diagnosis (WEMDCD), Vol.1, pp. 51-58, 2019.
  15. [15] A. V. Filatov, E. H. Maslen, and G. T. Gillies, “Stability of an electrodynamic suspension,” J. of Applied Physics, Vol.92, No.6, pp. 3345-3353, 2002.
  16. [16] J. F. Gieras, J. Mews, and P. Splawski, “Analytical calculation of electrodynamic levitation forces in a special-purpose linear induction motor,” IEEE Trans. on Industry Applications, Vol.48, No.1, pp. 106-116, 2011.
  17. [17] A. Hamler, V. Gorican, B. Štumberger, M. Jesenik, and M. Trlep, “Passive magnetic bearing,” J. of Magnetism and Magnetic Materials, Vol.272, pp. 2379-2380, 2004.
  18. [18] A. V. Filatov and E. H. Maslen, “Passive magnetic bearing for flywheel energy storage systems,” IEEE Trans. on Magnetics, Vol.37, No.6, pp. 3913-3924, 2001.
  19. [19] J. R. Melcher and H. H. Woodson, “Electromechanical dynamics, Part I: Discrete Systems,” John Wiley & Sons, Inc., 1968.
  20. [20] D. L. Trumper, “Magnetic suspension techniques for precision motion control,” Ph.D. thesis, Massachusetts Institute of Technology, 1990.
  21. [21] “Operation Principle of Voice Coil Actuator.” https://www.emworks.com/blog/electromechanical/electro-dynamic-thermal-simulation-of-a-voice-coil-actuator-using-ems-inside-solidworks [Accessed January 1, 2022]
  22. [22] D. B. Hiemstra, G. Parmar, and S. Awtar, “Performance tradeoffs posed by moving magnet actuators in flexure-based nanopositioning,” IEEE/ASME Trans. on Mechatronics, Vol.19, No.1, pp. 201-212, 2012.
  23. [23] “Linear Motors for Industrial Automation Applications.” https://www.pi-usa.us/en/tech-blog/linear-motors-for-industrial-automation-applications/ [Accessed January 1, 2022]
  24. [24] D. L. Trumper, W.-J. Kim, and M. E. Williams, “Design and analysis framework for linear permanent-magnet machines,” IEEE Trans. on Industry Applications, Vol.32, No.2, pp. 371-379, 1996.
  25. [25] D. L. Trumper, “Magnetic positioning device,” US Patent 5,196,745, March 23 1993.
  26. [26] W.-J. Kim and D. L. Trumper, “High-precision magnetic levitation stage for photolithography,” Precision Engineering, Vol.22, No.2, pp. 66-77, 1998.
  27. [27] A. E. Fitzgerald, C. Kingsley, S. D. Umans, and B. James, “Electric machinery,” Vol.5, McGraw-Hill, 2003.
  28. [28] H. A. Haus and J. R. Melcher, “Electromagnetic fields and energy,” Vol.107, Prentice Hall, 1989.
  29. [29] D. L. Trumper, S. M. Olson, and P. K. Subrahmanyan, “Linearizing control of magnetic suspension systems,” IEEE Trans. on Control Systems Technology, Vol.5, No.4, pp. 427-438, 1997.
  30. [30] I. R. I. MacKenzie, “Design and control methods for high-accuracy variable reluctance actuators,” Ph.D. thesis, Massachusetts Institute of Technology, 2015.
  31. [31] A. Katalenic, H. Butler, and P. P. v. d. Bosch, “High-precision force control of short-stroke reluctance actuators with an air gap observer,” IEEE/ASME Trans. on Mechatronics, Vol.21, No.5, pp. 2431-2439, 2016.
  32. [32] I. MacKenzie and D. L. Trumper, “Real-time hysteresis modeling of a reluctance actuator using a sheared-hysteresis-model observer,” IEEE/ASME Trans. on Mechatronics, Vol.21, No.1, pp. 4-16, 2016.
  33. [33] E. Ramirez-Laboreo, M. G. Roes, and C. Sagues, “Hybrid dynamical model for reluctance actuators including saturation, hysteresis, and eddy currents,” IEEE/ASME Trans. on Mechatronics, Vol.24, No.3, pp. 1396-1406, 2019.
  34. [34] E. Csencsics, J. Schlarp, T. Schopf, and G. Schitter, “Compact high performance hybrid reluctance actuated fast steering mirror system,” Mechatronics, Vol.62, 102251, 2019.
  35. [35] “Linear Position and Displacement Measurement With Capacitive and Eddy-Current Sensors.” https://www.lionprecision.com/linear-position-and-displacement-measurement-with-capacitive-and-eddy-current-sensors/ [Accessed January 1, 2022]
  36. [36] “Comparing Capacitive and Eddy-Current Sensors.” https://www.lionprecision.com/comparing-capacitive-and-eddy-current-sensors/ [Accessed January 1, 2022]
  37. [37] “How optical encoders work.” https://www.renishaw.com/en/how-optical-encoders-work-36979 [Accessed January 1, 2022]
  38. [38] “Interferometry Explained.” https://www.renishaw.com/en/interferometry-explained-7854 [Accessed January 1, 2022]
  39. [39] W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, and Y. Tomita, “A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning,” Precision Engineering, Vol.28, No.3, pp. 329-337, 2004.
  40. [40] “LK-G5000 Series Ultra High-Speed/High-Accuracy Laser Displacement Sensor Catalog.” https://www.keyence.com/products/measure/laser-1d/lk-g5000/ [Accessed January 1, 2022]
  41. [41] X. Lu, “Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same,” US Patent 10,958,148, March 23, 2021.
  42. [42] X. Lu et al., “Displacement devices and methods for fabrication, use and control of same,” US Patent 9,202,719, December 1, 2015.
  43. [43] D. Vischer and H. Bleuler, “Self-sensing active magnetic levitation,” IEEE Trans. on Magnetics, Vol.29, No.2, pp. 1276-1281, 1993.
  44. [44] M. D. Noh and E. H. Maslen, “Self-sensing magnetic bearings using parameter estimation,” IEEE Trans. on Instrumentation and Measurement, Vol.46, No.1, pp. 45-50, 1997.
  45. [45] R. Leach, “Fundamental principles of engineering nanometrology,” Elsevier, 2014.
  46. [46] W. Gao, T. Araki, S. Kiyono, Y. Okazaki, and M. Yamanaka, “Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder,” Precision Engineering, Vol.27, No.3, pp. 289-298, 2003.
  47. [47] H. Yu and W.-J. Kim, “A compact Hall-effect-sensing 6-DOF precision positioner,” IEEE/ASME Trans. on Mechatronics, Vol.15, No.6, pp. 982-985, 2010.
  48. [48] H. J. Ahn and K. R. Kim, “2D Hall sensor array for measuring the position of a magnet matrix,” Int. J. of Precision Engineering and Manufacturing-Green Technology, Vol.1, No.2, pp. 125-129, 2014.
  49. [49] X. Lu, N. Rao et al., “Six-axis position measurement system for levitated motion stages,” CIRP Annals, Vol.62, No.1, pp. 507-510, 2013.
  50. [50] A. Schammass, R. Herzog, P. Buhler, and H. Bleuler, “New results for self-sensing active magnetic bearings using modulation approach,” IEEE Trans. on Control Systems Technology, Vol.13, No.4, pp. 509-516, 2005.
  51. [51] D. T. Montie, “Performance limitations and self-sensing magnetic bearings,” University of Virginia, 2003.
  52. [52] E. H. Maslen, D. T. Montie, and T. Iwasaki, “Robustness limitations in self-sensing magnetic bearings,” J. Dyn. Sys., Meas., Control., Vol.128, No.2, pp. 197-203, 2006.
  53. [53] E. H. Maslen, “Self-sensing for active magnetic bearings: overview and status,” Proc. of the 10th Int. Symp. on magnetic bearings, Martigny, Switzerland, Vol.2123, 1319, 2006.
  54. [54] W.-J. Kim, “High-precision planar magnetic levitation,” Ph.D. thesis, Massachusetts Institute of Technology, 1997.
  55. [55] I. J. Compter, “Electro-dynamic planar motor,” Precision Engineering, Vol.28, No.2, pp. 171-180, 2004.
  56. [56] J. Jansen, C. Van Lierop, E. A. Lomonova, and A. J. Vandenput, “Magnetically levitated planar actuator with moving magnets,” IEEE Trans. on Industry Applications, Vol.44, No.4, pp. 1108-1115, 2008.
  57. [57] A. C. d. Klerk, G. Z. Angelis, and J. v. Eijk, “Design of a next generation 6 DoF stage for scanning application in vacuum with nanometer accuracy and mGauss magnetic stray field,” Proc. of the 19th ASPE Annual Meeting, pp. 60-63, 2004.
  58. [58] T. Hu and W.-J. Kim, “Extended range six-DOF high-precision positioner for wafer processing,” IEEE/ASME Trans. on Mechatronics, Vol.11, No.6, pp. 682-689, 2006.
  59. [59] C. Schaeffel, M. Katzschmann, H.-U. Mohr, R. Gloess, C. Rudolf, C. Mock, and C. Walenda, “6D planar magnetic levitation system-PIMag 6D,” Mechanical Engineering J., Vol.3, No.1, 15-00111, 2016.
  60. [60] A. Goos and R. Gloess, “Sensor Array and Algorithms for Current Control in a 6-DOF Magnetic Levitation Actuator,” Proc. of the 16th Int. Conf. on New Actuators (ACTUATOR 2018), pp. 1-4, 2018.
  61. [61] A. Goos, R. Ehrle, D. Geissler, and R. Gloess, “Magnetic Levitated Linear Scan Module With Nanometer Resolution,” Proc. 35th Annual Meeting of the American Society for Precision Engineering, pp. 58-62, 2020.
  62. [62] X. Lu et al., “6D direct-drive technology for planar motion stages,” CIRP Annals, Vol.61, No.1, pp. 359-362, 2012.
  63. [63] X. Lu et al., “Force ripple attenuation of 6-DOF direct drive permanent magnet planar levitating synchronous motors,” IEEE Trans. on Magnetics, Vol.51, No.12, pp. 1-8, 2015.
  64. [64] “Planar Motor Inc. – The Global Leader of Planar Motors.” https://www.planarmotor.com/products.html [Accessed January 1, 2022]
  65. [65] O.-S. Kim, S.-H. Lee, and D.-C. Han, “Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing,” IEEE Trans. on Industrial Electronics, Vol.50, No.2, pp. 374-378, 2003.
  66. [66] J. Y. Yoon, L. Zhou, and D. L. Trumper, “Linear stages for next generation precision motion systems,” Proc. of the 2019 IEEE/ASME Int. Conf. on Advanced Intelligent Mechatronics (AIM), pp. 241-247, 2019.
  67. [67] L. Zhou and D. L. Trumper, “Magnetically Levitated Linear Stage With Linear Bearingless Slice Hysteresis Motors,” IEEE/ASME Trans. on Mechatronics, Vol.26, No.2, pp. 1084-1094, 2020.
  68. [68] H. Zhu, T. J. Teo, and C. K. Pang, “Magnetically levitated Parallel Actuated Dual-Stage (Maglev-PAD) system for six-axis precision positioning,” IEEE/ASME Trans. on Mechatronics, Vol.24, No.4, pp. 1829-1838, 2019.
  69. [69] M. Takahashi, H. Ogawa, and T. Kato, “Compact maglev stage system for nanometer-scale positioning,” Precision Engineering, Vol.66, pp. 519-530, 2020.
  70. [70] D. Laro, E. Boots, J. v. Eijk, and L. Sanders, “Design and control of a through wall 450 mm vacuum compatible wafer stage,” Proc. of the 13th euspen Int. Conf., 2013.
  71. [71] A. Delissen, D. Laro, H. Kleijnen, F. v. Keulen, and M. Langelaar, “High-precision motion system design by topology optimization considering additive manufacturing,” Proc. of the 20th Int. Conf. of the European Society for Precision Engineering and Nanotechnology (euspen 2020), pp. 257-258, 2020.
  72. [72] C. Schaeffel, M. Katzschmann, H.-U. Mohr, R. Gloess, C. Rudolf, C. Mock, and C. Walenda, “Planar Magnetic 6D Levitating System with Compact Sensor,” Proc. of ASPE, 2012.
  73. [73] P. Studer, “A practical magnetic bearing,” IEEE Trans. on Magnetics, Vol.13, No.5, pp. 1155-1157, 1977.
  74. [74] R. Schoeb and N. Barletta, “Principle and application of a bearingless slice motor,” JSME Int. J. Series C Mechanical Systems, Machine Elements and Manufacturing, Vol.40, No.4, pp. 593-598, 1997.
  75. [75] M. Holmes, D. Trumper, and R. Hocken, “Atomic-scale precision motion control stage (the angstrom stage),” CIRP Annals, Vol.44, No.1, pp. 455-460, 1995.
  76. [76] M. Holmes and D. Trumper, “Magnetic/fluid-bearing stage for atomic-scale motion control (the angstrom stage),” Precision Engineering, Vol.18, No.1, pp. 38-49, 1996.
  77. [77] X. Shan, S.-K. Kuo, J. Zhang, and C.-H. Menq, “Ultra precision motion control of a multiple degrees of freedom magnetic suspension stage,” IEEE/ASME Trans. on Mechatronics, Vol.7, No.1, pp. 67-78, 2002.
  78. [78] S.-K. Kuo, X. Shan, and C.-H. Menq, “Large travel ultra precision xy-/spl theta/motion control of a magnetic-suspension stage,” IEEE/ASME Trans. on Mechatronics, Vol.8, No.3, pp. 334-341, 2003.
  79. [79] Z. Zhang and C.-H. Menq, “Six-axis magnetic levitation and motion control,” IEEE Trans. on Robotics, Vol.23, No.2, pp. 196-205, 2007.
  80. [80] T. Higuchi, “Applications of Magnetic Bearings in Robotics,” G. Schweitzer (Ed.), “Magnetic Bearings,” pp. 83-99, Springer, 1989.
  81. [81] M. Tsuda, T. Higuchi, and S. Fujiwara, “Magnetic levitation servo for flexible assembly automation,” The Int. J. of Robotics Research, Vol.11, No.4, pp. 329-345, 1992.
  82. [82] P. J. Berkelman, Z. J. Butler, and R. L. Hollis, “Design of a hemispherical magnetic levitation haptic interface device,” Proc. of the ASME Winter Annual Meeting, Symp. on Haptic Interfaces for Virtual Environment and Teleoperator Systems, Vol.58, pp. 483-488, 1996.
  83. [83] P. J. Berkelman and R. L. Hollis, “Lorentz magnetic levitation for haptic interaction: Device design, performance, and integration with physical simulations,” The Int. J. of Robotics Research, Vol.19, No.7, pp. 644-667, 2000.
  84. [84] R. Hollis, S. Salcudean, and A. Allan, “A six-degree-of-freedom magnetically levitated variable compliance fine-motion wrist: design, modeling, and control,” IEEE Trans. on Robotics and Automation, Vol.7, No.3, pp. 320-332, 1991.
  85. [85] S.-R. Oh, R. L. Hollis, and S. E. Salcudean, “Precision assembly with a magnetically levitated wrist,” Proc. of the IEEE Int. Conf. on Robotics and Automation, pp. 127-134, 1993.
  86. [86] P. Estevez, A. Mulder, and R. M. Schmidt, “6-DoF miniature maglev positioning stage for application in haptic micro-manipulation,” Mechatronics, Vol.22, No.7, pp. 1015-1022, 2012.
  87. [87] M. Dyck, X. Lu, and Y. Altintas, “Magnetically levitated rotary table with six degrees of freedom,” IEEE/ASME Trans. on Mechatronics, Vol.22, No.1, pp. 530-540, 2016.
  88. [88] S. Verma, W.-J. Kim, and H. Shakir, “Multi-axis maglev nanopositioner for precision manufacturing and manipulation applications,” IEEE Trans. on Industry Applications, Vol.41, No.5, pp. 1159-1167, 2005.
  89. [89] W.-J. Kim, S. Verma, and H. Shakir, “Design and precision construction of novel magnetic-levitation-based multi-axis nanoscale positioning systems,” Precision Engineering, Vol.31, No.4, pp. 337-350, 2007.
  90. [90] I. Heyman and L. Zhou, “Magnetically Levitated XYZ-Nanopositioning Sample Stage for X-ray Microscopes,” Proc. of the 36th Annual Meeting of the American Society for Precision Engineering, 2021.
  91. [91] A. Anthis, D. Trumper, and T. Hamer, “Design and Verification of a Planar, Flux-Steering Magnetic Actuator,” Proc. of the 36th ASPE Annual Meeting, 2021.
  92. [92] S. Verma, W.-J. Kim, and J. Gu, “Six-axis nanopositioning device with precision magnetic levitation technology,” IEEE/ASME Trans. on Mechatronics, Vol.9, No.2, pp. 384-391, 2004.
  93. [93] C. Van Lierop, J. Jansen, A. Damen, E. Lomonova, P. Van Den Bosch, and A. Vandenput, “Model-based commutation of a long-stroke magnetically levitated linear actuator,” IEEE Trans. on Industry Applications, Vol.45, No.6, pp. 1982-1990, 2009.
  94. [94] X. Lu, M. Dyck, and Y. Altintas, “Magnetically levitated six degree of freedom rotary table,” CIRP Annals, Vol.64, No.1, pp. 353-356, 2015.
  95. [95] R. Gloess, “Mag-6D a new mechatronics design of a levitation stage with nanometer resolution,” Proc. of the 31th ASPE Annual Meeting, pp. 423-427, 2016.
  96. [96] R. Gloess and A. Goos, “Magnetic levitation stages for planar and linear scan application with nanometer resolution,” Int. J. of Applied Electromagnetics and Mechanics, Vol.63, No.1, pp. 105-117, 2020.
  97. [97] X. Li, H. Zhu, J. Ma, T. J. Teo, C. S. Teo, M. Tomizuka, and T. H. Lee, “Data-driven multiobjective controller optimization for a magnetically levitated nanopositioning system,” IEEE/ASME Trans. on Mechatronics, Vol.25, No.4, pp. 1961-1970, 2020.
  98. [98] C. R. Carignan and K. R. Cleary, “Closed-loop force control for haptic simulation of virtual environments,” Haptics-e: Electronic J. Haptics Res., Vol.1, pp. 1-14, 2000.
  99. [99] D. A. Lawrence, “Stability and transparency in bilateral teleoperation,” IEEE Trans. on Robotics and Automation, Vol.9, No.5, pp. 624-637, 1993.
  100. [100] R. Baade, “Linear, Low-mass, Low-cost: Wafer-handler systems engineering and magnetic bearing design,” Mikroniek, 2020.
  101. [101] “Maglev 200™ System: High-fidelity interaction with virtual or remote environments.” https://butterflyhaptics.com/products/system/ [Accessed January 1, 2022]
  102. [102] R. Hollis, “Maglev haptics: butterfly haptic’s new user interface technology,” ACM SIGGRAPH 2008 new tech demos, p. 1, 2008.
  103. [103] Y. Horiuchi, “Development of Magnetically Suspended Sliders for deployable antenna test facility,” Proc. of the 5th Int. Symp. on Magnetic Bearings, pp. 363-368, 1996.
  104. [104] W. Gruber, “Bearingless slice motors: General overview and the special case of novel magnet-free rotors,” Innovative Small Drives and Micro-Motor Systems; 9, GMM/ETG Symp., pp. 1-6, 2013.
  105. [105] D. Laro, R. Boshuizen, D. Oom, L. Sanders, and J. v. Eijk, “Lightweight 450 mm wafer stages enabled by over-actuation,” Proc. of the 10th Int. Conf. of the European Society for Precision Engineering and Nanotechnology (euspen 2010), Vol.1, pp. 433-436, 2010.
  106. [106] J. Janssen, J. Paulides, E. Lomonova, B. Delinchant, and J.-P. Yonnet, “Design study on a magnetic gravity compensator with unequal magnet arrays,” Mechatronics, Vol.23, No.2, pp. 197-203, 2013.
  107. [107] S. Hol, E. Lomonova, and A. Vandenput, “Design of a magnetic gravity compensation system,” Precision Engineering, Vol.30, No.3, pp. 265-273, 2006.
  108. [108] H. Zhang, B. Kou, Y. Jin, H. Zhang, and L. Zhang, “Research on a low stiffness passive magnetic levitation gravity compensation system with opposite stiffness cancellation,” IEEE Trans. on Magnetics, Vol.50, No.11, pp. 1-4, 2014.
  109. [109] S. Roux, F. M. Carter, and R. I. Mackenzie, “Method for controlling the position of a movable object, a control system for controlling a positioning device, and a lithographic apparatus,” US Patent 8,553,205, October 8, 2013.
  110. [110] J. Y. Yoon, J. H. Lang, and D. L. Trumper, “Double-Sided Linear Iron-Core Fine-Tooth Motor for Low Acoustic Noise and High Acceleration,” IEEE/ASME Trans. on Mechatronics, Vol.24, No.5, pp. 2161-2170, 2019.
  111. [111] H. B. Koolmees and J. P. M. B. Vermeulen, “Assembly Comprising a Cryostat and Layer of Superconducting Coils and Motor System Provided With Such an Assembly,” US Patent 15/734,882, July 22, 2021.
  112. [112] T. Oomen, R. v. Herpen, S. Quist, M. v. d. Wal, O. Bosgra, and M. Steinbuch, “Connecting system identification and robust control for next-generation motion control of a wafer stage,” IEEE Trans. on Control Systems Technology, Vol.22, No.1, pp. 102-118, 2013.
  113. [113] T. Oomen, “Advanced motion control for precision mechatronics: Control, identification, and learning of complex systems,” IEEJ J. of Industry Applications, Vol.7, No.2, pp. 127-140, 2018.
  114. [114] G. v. d. Veen, M. Langelaar, S. v. d. Meulen, D. Laro, W. Aangenent, and F. v. Keulen, “Integrating topology optimization in precision motion system design for optimal closed-loop control performance,” Mechatronics, Vol.47, 13, 2017.
  115. [115] J. Wang, M. Zhang, Y. Zhu, K. Yang, X. Li, L. Wang, J. Hu, and C. Hu, “Integrated optimization of 3D structural topology and actuator configuration for vibration control in ultra-precision motion systems,” Structural and Multidisciplinary Optimization, Vol.60, No.3, pp. 909-925, 2019.
  116. [116] R. Ding, C. Ding, Y. Xu, W. Liu, and X. Yang, “An optimal actuator placement method for direct-drive stages to maximize control bandwidth,” Proc. of the 46th Annual Conf. of the IEEE Industrial Electronics Society (IECON 2020), pp. 556-561, 2020.
  117. [117] J. Wu and L. Zhou, “Control Co-design of Actively Controlled Lightweight Structures for High-acceleration Precision Motion Systems,” Proc. of the 2022 American Control Conf. (ACC), 2022 (to appear).
  118. [118] “Calnetix Active Magnetic Bearings for Optimized System Efficiency and Enhanced Reliability and Sustainability.” https://www.calnetix.com/active-magnetic-bearings [Accessed January 1, 2022]
  119. [119] “SKF Magnetic bearings and systems.” https://www.skf.com/group/products/magnetic-bearings-systems [Accessed January 1, 2022]
  120. [120] H. Bleuler, “Magnetic levitation: Challenge for control design in mechatronics,” Seisan Kenkyu (Monthly J. of the Institute of Industrial Science, University of Tokyo), Vol.44, No.12, pp. 578-583, 1992.
  121. [121] K. Park, K. Ahn, S. Kim, and Y. K. Kwak, “Wafer distribution system for a clean room using a novel magnetic suspension technique,” IEEE/ASME Trans. on Mechatronics, Vol.3, No.1, pp. 73-78, 1998.
  122. [122] J.-P. Yonnet, “Passive magnetic bearings with permanent magnets,” IEEE Trans. on Magnetics, Vol.14, No.5, pp. 803-805, 1978.
  123. [123] M. V. Berry and A. K. Geim, “Of flying frogs and levitrons,” European J. of Physics, Vol.18, No.4, 307, 1997.
  124. [124] A. Hsu, C. Cowan, W. Chu, B. McCoy, A. Wong-Foy, R. Pelrine, C. Velez, D. Arnold, J. Lake, J. Ballard et al., “Automated 2D micro-assembly using diamagnetically levitated milli-robots,” Proc. of the 2017 Int. Conf. on Manipulation, Automation and Robotics at Small Scales (MARSS), pp. 1-6, 2017.
  125. [125] “Magnetic Levitation Studied at JPL for Moving Payloads Around the Moon.” https://www-robotics.jpl.nasa.gov/what-we-do/research-tasks/flexible-levitation-track-float/ [Accessed January 1, 2022]

Creative Commons License  This article is published under a Creative Commons Attribution-NoDerivatives 4.0 Internationa License.

*This site is desgined based on HTML5 and CSS3 for modern browsers, e.g. Chrome, Firefox, Safari, Edge, Opera.

Last updated on Nov. 22, 2024