Summary: This paper proposes a new efficient method of characterizing a memory compiler in order to reduce the computation time and remove human error. The new features that make our method greatly efficient are the following three points: (1) high-speed circuit simulation of the whole memory module using a hierarchical LPE (Layout Parasitic Extractor) and a hierarchical circuit simulator, (2) automatic generation of circuit simulation input data from corresponding parameterized description termed the template file, and (3) carefully selected environmental conditions of circuit level simulator and minimizing the number of runs of it. We demonstrate the effectiveness of the proposed method by application to the single-port SRAM generators using 90 nm CMOS technology.