Abstract
As a classic weak magnetic field sensor, the fluxgate sensors have great potential application in many fields. This paper presents four kinds of the micro planar double-axis fluxgate sensors based on the MEMS technologies, which have different core materials and core structures. The core materials include electroplated permalloy, Co-based amorphous ribbon and Fe-based amorphous ribbon, and the core structures include single-layer open magnetic loop structure and double-layer closed magnetic loop structure. The sensor with closed double-layer Fe-based ribbon core exhibits a best sensitivity of 238 V/T due to reducing the magnetic flux leakage. The results show that the magnetic core with closed magnetic loop, high permeability and high saturation induction density will help increase the sensitivity of the micro double-axis fluxgate sensor.
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Acknowledgments
This work is supported by The National Natural Science Foundation of China (Nos. 61074168 and 61273065), National Science and Technology Support Program (2012BAK08B05), Natural Science Foundation of Shanghai (13ZR1420800), the Analytical and Testing Center in Shanghai Jiao Tong University, the Center for Advanced Electronic Materials and Devices in Shanghai Jiao Tong University.
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Liu, Y., Yang, Z., Wang, T. et al. Improved performance of the micro planar double-axis fluxgate sensors with different magnetic core materials and structures. Microsyst Technol 22, 2341–2347 (2016). https://doi.org/10.1007/s00542-015-2618-0
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DOI: https://doi.org/10.1007/s00542-015-2618-0