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MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils

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Abstract

As a classic Earth magnetic field sensor, fluxgate magnetic sensors have great potential applications in many fields. This paper presents a new 3D micro-solenoid fluxgate magnetic sensor based on the MEMS technique. The excitation coils were placed vertically to the detection coils on the chip plane, around a rectangular shaped magnetic core. Polyimide was used to insulate coils and magnetic core. Width of copper conductor lines is 50 μm, and line space is 50 μm. The design of such fluxgate magnetic sensor followed second harmonic signal selecting method. Phase-lock amplifier was used to get second harmonic signal output by detection coils. The linear range of 0–80 μT with sensitivity of 6.7 V/T was achieved from the fabricated sensor with excitation current of 430 mA and the operational frequency of 40 KHz. As the excitation current was 470 mA, linear range of 0–50 μT with sensitivity of 21.7 V/T was achieved.

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Acknowledgments

This work was supported by the National High Technology Research and Development Program (2006AA03Z301), the Nanotechnology Program of Shanghai Science & Technology committee (No. 0652nm004 and No. 0752nm004), National Key Lab Research Fund (No. 9140C7903090707) and the Non-Silicon Precision Micromachining & Microfabrication Technology (D2320060098).

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Authors and Affiliations

  1. National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science & Technology, Shanghai Jiao Tong University, Dongchuan Road 800, 200240, Shanghai, China

    Chong Lei, Ren Wang, Yong Zhou & Zhimin Zhou

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  1. Chong Lei
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  2. Ren Wang
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  3. Yong Zhou
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  4. Zhimin Zhou
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Correspondence to Chong Lei.

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Lei, C., Wang, R., Zhou, Y. et al. MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils. Microsyst Technol 15, 969–972 (2009). https://doi.org/10.1007/s00542-009-0847-9

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  • DOI: https://doi.org/10.1007/s00542-009-0847-9

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