2023 Volume E106.C Issue 11 Pages 748-756
The optical phased array (OPA) is an emerging non-mechanical device that enables high-speed beam steering by emitting precisely phase-controlled lightwaves from numerous optical antennas. In practice, however, it is challenging to drive all phase shifters on an OPA in a deterministic manner due to the inevitable fabrication-induced phase errors and crosstalk between the phase shifters. In this work, we fabricate a 16-element silicon photonic non-redundant OPA chip with integrated phase monitors and experimentally demonstrate accurate monitoring of the relative phases of light from each optical antenna. Under the beam steering condition, the optical phase retrieved from the on-chip phase monitors varies linearly with the steering angle, as theoretically expected.