A CMOS-MEMS cantilever sensor for capnometric applications

LETTER

Asif Mirza, N. H. Hamid, M. H. Md. Khir, J. O. Dennis, Khalid Ashraf, Muhammad Shoaib, Mohammad Tariq Jan

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Keywords: capnometers, CMOS-MEMS, CO₂ sensor, quality factor, microcantilever

JOURNAL FREE ACCESS

2014 Volume 11 Issue 9 Pages 20140113

DOI https://doi.org/10.1587/elex.11.20140113

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Abstract

Capnometers monitor the concentration of CO₂ in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO₂ sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively.

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