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"Design, development, and testing of real-time feedback controllers for ..."

I. G. Rosen et al. (2002)

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DOI: 10.1109/87.974339

access: closed

type: Journal Article

metadata version: 2020-06-08

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  - journals/tcst/RosenPFWM02
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  - https://dblp.org/rec/journals/tcst/RosenPFWM02
I. G. Rosen, Tyler Parent, Baris Fidan, Chunming Wang, Anupam Madhukar:
Design, development, and testing of real-time feedback controllers for semiconductor etching processes using in situ spectroscopic ellipsometry sensing. IEEE Trans. Control. Syst. Technol. 10(1): 64-75 (2002)

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