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"A neural-network-based approach to determining a robust process recipe for ..."

I. Gary Rosen et al. (2001)

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DOI: 10.1109/87.911379

access: closed

type: Journal Article

metadata version: 2020-06-08

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  - journals/tcst/RosenPCCM01
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  - https://dblp.org/rec/journals/tcst/RosenPCCM01
I. Gary Rosen, Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar:
A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films. IEEE Trans. Control. Syst. Technol. 9(2): 271-284 (2001)

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