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"Oxide and interface trap densities estimation in ultrathin ..."

M. Mamatrishat et al. (2012)

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DOI: 10.1016/J.MICROREL.2011.12.025

access: closed

type: Journal Article

metadata version: 2021-10-14

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M. Mamatrishat, T. Kubota, T. Seki, Kuniyuki Kakushima, Parhat Ahmet, Kazuo Tsutsui, Yoshinori Kataoka, Akira Nishiyama, Nobuyuki Sugii, Kenji Natori, Takeo Hattori, Hiroshi Iwai:
Oxide and interface trap densities estimation in ultrathin W/La₂O₃/Si MOS capacitors. Microelectron. Reliab. 52(6): 1039-1042 (2012)

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