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"Enhanced fatigue resistance of ferroelectric Al0.65Sc0.35N deposited by ..."

Yang Li et al. (2024)

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DOI: 10.1007/S11432-023-3960-6

access: closed

type: Journal Article

metadata version: 2024-06-13

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  - https://dblp.org/rec/journals/chinaf/LiYLJWRZWWH24
Yang Li, Danyang Yao, Yan Liu, Zhi Jiang, Ruiqing Wang, Xu Ran, Jiuren Zhou, Qikun Wang, Guoqiang Wu, Genquan Han:
Enhanced fatigue resistance of ferroelectric Al0.65Sc0.35N deposited by physical vapor deposition. Sci. China Inf. Sci. 67(5) (2024)

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