default search action

combined dblp search
author search
venue search
publication search

ask others

"Tensor-based process control and monitoring for semiconductor ..."

Yanrong Li et al. (2024)

> Home

Details and statistics

DOI: 10.48550/ARXIV.2401.17573

access: open

type: Informal or Other Publication

metadata version: 2024-11-08

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/corr/abs-2401-17573
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-2401-17573
Yanrong Li, Juan Du, Fugee Tsung, Wei Jiang:
Tensor-based process control and monitoring for semiconductor manufacturing with unstable disturbances. CoRR abs/2401.17573 (2024)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.