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"Study on PSZT thin films for microforce sensors."

Yan Cui et al. (2009)

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DOI: 10.1109/NEMS.2009.5068579

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  dblp key:
  - conf/nems/CuiCXZWW09
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  persistent URL:
  - https://dblp.org/rec/conf/nems/CuiCXZWW09
Yan Cui, Huilin Chen, Jinsong Xia, Jiaxin Zhao, Jing Wang, Liding Wang:
Study on PSZT thin films for microforce sensors. NEMS 2009: 286-290

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