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"Structure-based equivalent circuit modeling of a capacitive-type MEMS ..."

Jaewoo Lee et al. (2012)

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DOI: 10.1109/ISCIT.2012.6380896

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Jaewoo Lee, C. H. Je, Woo-Seok Yang, Jongdae Kim:
Structure-based equivalent circuit modeling of a capacitive-type MEMS microphone. ISCIT 2012: 228-233

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