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"Photoluminescence properties of thin-film SiOxCy deposited by O-Cat CVD ..."

Manmohan Jain et al. (2020)

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DOI: 10.1109/CCE50788.2020.9299113

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-07

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  dblp key:
  - conf/iceee/JainRDM20
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  - https://dblp.org/rec/conf/iceee/JainRDM20
Manmohan Jain, J. R. Ramos-Serrano, Ateet Dutt, Yasuhiro Matsumoto:
Photoluminescence properties of thin-film SiOxCy deposited by O-Cat CVD technique using MMS and TEOS. CCE 2020: 1-6

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