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"Simultaneous template optimization and mask assignment for DSA with ..."

Jian Kuang, Junjie Ye, Evangeline F. Y. Young (2016)

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DOI: 10.1109/ASPDAC.2016.7427992

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Jian Kuang, Junjie Ye, Evangeline F. Y. Young:
Simultaneous template optimization and mask assignment for DSA with multiple patterning. ASP-DAC 2016: 75-82

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