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"Energy-Efficient Semiconductor Manufacturing: Establishing an Ecological ..."

Anna Hopf et al. (2022)

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DOI: 10.1109/WSC57314.2022.10015333

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-11

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Anna Hopf, Abdelgafar Ismail, Hans Ehm, Daniel Schneider, Gunther Reinhart:
Energy-Efficient Semiconductor Manufacturing: Establishing an Ecological Operating Curve. WSC 2022: 3453-3464

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