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"AlGaN/GaN HEMTs with a magnetron-sputtered AlN buffer layer."

Chunxiao Zhao et al. (2023)

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DOI: 10.1016/J.MEJO.2023.105926

access: closed

type: Journal Article

metadata version: 2023-10-16

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  - journals/mj/ZhaoZZSWWHWLY23
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  - https://dblp.org/rec/journals/mj/ZhaoZZSWWHWLY23
Chunxiao Zhao, Ni Zeng, Bingzhi Zou, Qiao Sun, Jinyi Wang, Kejun Wei, Zeyu Huang, Tiankai Wang, Jingjing Lin, Yian Yin:
AlGaN/GaN HEMTs with a magnetron-sputtered AlN buffer layer. Microelectron. J. 140: 105926 (2023)

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