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"Surface instability of thin polymer resist films with phase change effects ..."

Ming-Che Lin (2014)

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DOI: 10.1016/J.CAMWA.2014.08.003

access: open

type: Journal Article

metadata version: 2021-02-11

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Ming-Che Lin:
Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques. Comput. Math. Appl. 68(8): 847-858 (2014)

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