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"A Wafer Prealignment Algorithm Based on Fourier Transform and Least Square ..."

Jiayu Xu et al. (2017)

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DOI: 10.1109/TASE.2016.2645234

access: closed

type: Journal Article

metadata version: 2020-04-02

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  - journals/tase/XuHLL17
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  - https://dblp.org/rec/journals/tase/XuHLL17
Jiayu Xu, Hong Hu, Yulin Lei, Huaiyuan Liu:
A Wafer Prealignment Algorithm Based on Fourier Transform and Least Square Regression. IEEE Trans Autom. Sci. Eng. 14(4): 1771-1777 (2017)

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