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"Application of automated design migration to alternating phase shift mask ..."

Fook-Luen Heng, Lars Liebmann, Jennifer Lund (2001)

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DOI: 10.1145/369691.369729

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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  - conf/ispd/HengLL01
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Fook-Luen Heng, Lars Liebmann, Jennifer Lund:
Application of automated design migration to alternating phase shift mask design. ISPD 2001: 38-43

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