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"Analysis of the dynamic behavior of a doped silicon U-shaped ..."

Hussein Hussein et al. (2015)

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DOI: 10.1109/AIM.2015.7222642

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Hussein Hussein, Patrice Le Moal, Gilles Bourbon, Yassine Haddab, Philippe Lutz:
Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator. AIM 2015: 836-841

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