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"Hybrid lithography system for MEMS/NEMS."

Linsen Chen et al. (2013)

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DOI: 10.1109/NEMS.2013.6559737

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Linsen Chen, Donglin Pu, Jin Hu, Yan Ye, Pengfei Zhu:
Hybrid lithography system for MEMS/NEMS. NEMS 2013: 304-307

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