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"A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape ..."

Fujun Wang et al. (2019)

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DOI: 10.1109/TIE.2018.2885716

access: closed

type: Journal Article

metadata version: 2021-08-31

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  - https://dblp.org/rec/journals/tie/WangHLSTZZ19
Fujun Wang, Zhichen Huo, Cunman Liang, Beichao Shi, Yanling Tian, Xingyu Zhao, Dawei Zhang:
A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier. IEEE Trans. Ind. Electron. 66(12): 9161-9172 (2019)

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