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"Ultraviolet lithography on sloped surfaces utilizing diamond turned holograms."

Ekkard Brinksmeier et al. (2013)

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DOI: 10.1007/S11740-013-0489-8

access: closed

type: Journal Article

metadata version: 2020-10-26

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  dblp key:
  - journals/peng/BrinksmeierVRKMKM13
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  persistent URL:
  - https://dblp.org/rec/journals/peng/BrinksmeierVRKMKM13
Ekkard Brinksmeier, Frank Vollertsen, Oltmann Riemer, Michael Koerdt, Axel Meier, Simon Kibben, Jan Möller:
Ultraviolet lithography on sloped surfaces utilizing diamond turned holograms. Prod. Eng. 7(6): 619-627 (2013)

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