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"Erratum to: A sparse matrix model-based optical proximity correction ..."

Bin Lin et al. (2011)

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DOI: 10.1631/JZUS.C10E0219

access: closed

type: Journal Article

metadata version: 2023-07-28

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Bin Lin, Xiaolang Yan, Zheng Shi, Yiwei Yang:
Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites. J. Zhejiang Univ. Sci. C 12(7): 614 (2011)

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