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"Kinetic Processes and Phase-transition of CVD Processes for Ti2SiC3."

Jürgen Geiser, Robert Röhle (2010)

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DOI: —

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type: Journal Article

metadata version: 2020-05-22

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Jürgen Geiser, Robert Röhle:
Kinetic Processes and Phase-transition of CVD Processes for Ti2SiC3. J. Convergence Inf. Technol. 5(6): 9-32 (2010)

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