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"A Designer's Guide to Subresolution Lithography: Enabling the Impossible ..."

Lars Liebmann, J. Andres Torres (2013)

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DOI: 10.1109/MDAT.2013.2255911

access: closed

type: Journal Article

metadata version: 2020-03-13

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Lars Liebmann, J. Andres Torres:
A Designer's Guide to Subresolution Lithography: Enabling the Impossible to Get to the 14-nm Node [Tutorial]. IEEE Des. Test 30(3): 70-92 (2013)

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