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"The improvement of electrochemical etching process for silicon ..."

Ding Yuan et al. (2009)

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DOI: 10.1109/NEMS.2009.5068734

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - conf/nems/YuanCTSXXW09
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  - https://dblp.org/rec/conf/nems/YuanCTSXXW09
Ding Yuan, Pengliang Ci, Fei Tian, Jing Shi, Shaohui Xu, Peisheng Xin, Lianwei Wang:
The improvement of electrochemical etching process for silicon microchannel plates. NEMS 2009: 964-969

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