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"Rapid thermal annealing for carbon nanotube thin film transistors by a ..."

Chun Chen et al. (2016)

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DOI: 10.1109/NEMS.2016.7758310

access: closed

type: Conference or Workshop Paper

metadata version: 2022-02-23

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Chun Chen, Yanyan Deng, Peijian He, Min Zhang:
Rapid thermal annealing for carbon nanotube thin film transistors by a double-themral-region furnace. NEMS 2016: 545-548

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