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"Direct measurements of anchor damping in MEMS resonators."
Janna Rodriguez et al. (2017)
- Janna Rodriguez, Dustin D. Gerrard, Grant M. Glaze, Saurabh Chandorkar, Lizmarie Comenecia, Yunhan Chen, Ian B. Flader, Thomas W. Kenny:
Direct measurements of anchor damping in MEMS resonators. IEEE SENSORS 2017: 1-3
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