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"Low actuation voltage silicon carbide RF switches for MEMS above IC."
Paul-Vahe Cicek et al. (2009)
- Paul-Vahe Cicek, Sareh Mahdavi, Frederic Nabki, Mourad N. El-Gamal:
Low actuation voltage silicon carbide RF switches for MEMS above IC. ICECS 2009: 223-226
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