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"Simultaneous template assignment and layout decomposition using multiple ..."

Kuo-Hao Wu, Shao-Yun Fang (2017)

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DOI: 10.1109/ICCAD.2017.8203784

access: closed

type: Conference or Workshop Paper

metadata version: 2018-04-09

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  - https://dblp.org/rec/conf/iccad/WuF17
Kuo-Hao Wu, Shao-Yun Fang:
Simultaneous template assignment and layout decomposition using multiple bcp materials in DSA-MP lithography. ICCAD 2017: 239-244

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