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"Investigation of Surface Integrity in the Case of Chemical Mechanical ..."

Xuesong Han (2006)

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DOI: 10.1007/11941354_67

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Xuesong Han:
Investigation of Surface Integrity in the Case of Chemical Mechanical Polishing Silicon Wafer by Molecular Dynamics Simulation Method. ICAT 2006: 651-659

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